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Well, in the cartoon, it was the Quintessons, in the comics it was Primus, who was a Transformer himself (his alt-mode was Cybertron. Literally, Cybertron itself). If you listen to the movies and the Animated continuity, the AllSpark did it by bringing mechanical devices to life. There's also been this theory going around that they were organic at first, then made new mechanical bodies for themselves.

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